3d patterning of si by contact etching with nanoporous metals

HIGHLIGHTS

  • who: Stéphane Bastide from the Institut de Chimie et des Paris-Est (UMR, ), CNRS, UPEC, Université Est, Thiais, France, Institut Arizona State University, United States have published the article: 3D Patterning of Si by Contact Etching With Nanoporous Metals, in the Journal: (JOURNAL)
  • what: The authors show this time that a complete transfer of complex patterns can be obtained in n-type silicon by contact etching, either electrochemically or chemically. With pyramids, "damaged tips" was the main reason for overruling an electrode.
  • how: The highlights that can be drawn from these results . . .

     

    Logo ScioWire Beta black

    If you want to have access to all the content you need to log in!

    Thanks :)

    If you don't have an account, you can create one here.

     

Scroll to Top

Add A Knowledge Base Question !

+ = Verify Human or Spambot ?