A closed-loop interface for a mems accelerometer with digital built-in self-test function

HIGHLIGHTS

• who: Dongliang Chen and collaborators from the Harbin, China have published the Article: A Closed-Loop Interface for a MEMS Accelerometer with Digital Built-In Self-Test Function, in the Journal: Micromachines 2018, 9, x FOR PEER REVIEW of /2018/
• what: The authors propose a fifth-order Σ∆ closed-loop interface for a capacitive MEMS accelerometer.

SUMMARY

An EM-Σ∆ closed-loop architecture has been proposed, which incorporates the sensing element into a Σ∆ modulation loop. A capacitive MEMS accelerometer is chosen the front-end sensing element forhigh its high output low temperature sensitivity . . .

 



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