HIGHLIGHTS
- who: Zakhar Vakulov et al. from the , Chekhov St, Rostov-on-Don, Russia Research Laboratory of Functional Nanomaterials Technology, Southern Federal University, Shevchenko St have published the research: Towards Scalable Large-Area Pulsed Laser Deposition, in the Journal: Materials 2021, 14, x FOR PEER REVIEW of /2021/
- what: The aim of this work is to study the processes affecting film thickness uniformity deposited by the PLD method on substrates of large diameter (100 mm and more) and developing the methodology that allows calculating the film thickness distribution profile over the substrate surface, taking into account . . .
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