Scaling growth rates for perovskite oxide virtual substrates on silicon

HIGHLIGHTS

• who: Jason Lapano from the State University, PA, USA have published the research: Scaling growth rates for perovskite oxide virtual substrates on silicon, in the Journal: NATURE COMMUNICATIONS NATURE COMMUNICATIONS
• what: The authors report that the adsorption-controlled growth of SrTiO3 films by hybrid MBE is scaled to growth rates in excess of 600 nm h-1 with no degradation in structural film quality, rivaling the MBE growth rates commonly employed in industry for the growth of semiconductor thin films.
• how: To directly prove the compatibility of high SrTiO3 film growth rates with . . .
  

   

  

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