HIGHLIGHTS
- who: Shi Lun and colleagues from the School of Mechanical Engineering, Shanghai Jiao Tong University u02c8Shanghaiu02c8China have published the Article: Study on a New Method for Improving Resolution of Grating Interferometer Displacement Measuring System, in the Journal: (JOURNAL)
- what: In this paper, a phase shift method applied on grating interferometer stripe is developed and it will get higher displacement measuring resolution in ultra-precision positioning system. When the reference grating (or linear table) shifts u0394x along the direction shown in Fig 1, the phase variation of the two coherent light beams i : u0394x u0394u03a6=u03c0m . . .
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