Development of broadband high-frequency piezoelectric micromachined ultrasonic transducer array

HIGHLIGHTS

  • who: Xu-Bo Wang and collaborators from the State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, INSA Hauts-de-France, Mont Houy, Valenciennes, France have published the research: Development of Broadband High-Frequency Piezoelectric Micromachined Ultrasonic Transducer Array, in the Journal: Sensors 2021, 21, 1823 Device of /2021/
  • what: In this paper a polydimethylsiloxane (PDMS) backing structure is introduced into the PMUTs to improve the device bandwidth while keeping a sub-wavelength (λ) pitch. The authors implement this backing on a 16 × 8 array with 75 µm pitch (3λ/4) with a . . .

     

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