HIGHLIGHTS
- who: B. K. Tanner and collaborators from the Department of Physics, Durham University, South Road, Durham, County Durham , LE, UK, bKristallographie have published the research: research papers, in the Journal: (JOURNAL)
- what: The authors show in this paper that the technique can be used to measure the warpage in packaged chips and compare the method with the section topography technique.
- future: Interpretation is further complicated by caustics from the Bremsstrahlung and therefore is not straightforward for highly distorted wafers such as shown in Figs 6 and 12 and further work is needed to . . .
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