A dmd based uv lithography method with improved dynamical modulation range for the fabrication of curved microstructures

HIGHLIGHTS

  • who: Zhimin Zhang and colleagues from the Nanchang Hangkong University, Nanchang, China have published the research: A DMD based UV lithography method with improved dynamical modulation range for the fabrication of curved microstructures, in the Journal: (JOURNAL)
  • what: In this study a method is proposed for the high fidelity fabrication of curved microstructures using DMD based dynamical ultraviolet lithography. The authors demonstrate the effectiveness of the method by theoretically simulating and experimentally fabricating a curved microlens array compared with DMD gray-scale lithography.
  • how: In the experiments a custom-made DMD based lithography . . .

     

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