Study of the correlation between the amorphous indium-gallium-zinc oxide film quality and the thin-film transistor performance

HIGHLIGHTS

  • who: Shiben Hu and collaborators from the Institute of Semiconductors, Guangdong Academy of Sciences, Guangzhou, China have published the research work: Study of the Correlation between the Amorphous Indium-Gallium-Zinc Oxide Film Quality and the Thin-Film Transistor Performance, in the Journal: Nanomaterials 2021, 11, 522. of /2021/
  • what: We systematically studied the effect of film quality on device performance by XRR and ยต-PCD measurements.
  • how: The results showed that the process conditions have a substantial impact on the film densities and defect states which in turn affect the of the final . . .

     

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