Pressure dependence of singly and doubly charged ion formation in a hipims discharge

HIGHLIGHTS

• who: R. Hippler et al. from the Institut für Physik, Universität Greifswald, Felix-Hausdorff-Str6, Greifswald, Germany Faculty of Science, University of South Bohemia, Branisovska, Ceske Budejovice, Czech Republic have published the research: Pressure dependence of singly and doubly charged ion formation in a HiPIMS discharge, in the Journal: (JOURNAL)
• what: The authors investigate the formation of singly - charged Ar- and Ti- monomer, Ar- 2 and Ti2 dimer, and doubly charged Ar2- and Ti2- ions in a high power impulse magnetron sputtering (HiPIMS) discharge with a titanium target.

SUMMARY

 



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