Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process

HIGHLIGHTS

  • who: Hamed Sattari and colleagues from the u00c9cole Polytechnique Fu00e9du00e9rale de Lausanne, Lausanne, Switzerland Ghent University, Ghent, Belgium have published the research: Silicon photonic microelectromechanical systems add-drop ring resonator in a foundry process, in the Journal: (JOURNAL) of 31/01/2023
  • what: The authors demonstrate the design simulation fabrication and experimental characterization of a compact add-drop filter based on a vertically movable MEMS-actuated ring resonator. Although in this work the authors are focused on a translational displacement coinciding with the fundamental mode profile of the device, the two succeeding tilting modes would . . .

     

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