Characterization of argon/hydrogen inductively coupled plasma for carbon removal over multilayer thin films

HIGHLIGHTS

  • who: Yi Wang et al. from the Light Technology Institute, Karlsruhe Institute of Technology, Karlsruhe, Germany have published the paper: Characterization of Argon/Hydrogen Inductively Coupled Plasma for Carbon Removal over Multilayer Thin Films, in the Journal: Coatings 2023, 13, x FOR PEER REVIEW of /2023/
  • what: Dissociation of the hydrogen molecule [36].
  • how: In this study Ar/H2 non-equilibrium plasma is applied for a reaction with carbon.

SUMMARY

    In the previous studies, carbon removal rate increased by Ar/H2 mixed plasma compared with pure hydrogen or argon . . .

     

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