HIGHLIGHTS
- who: Lei Wang and collaborators from the Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, China have published the Article: Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS, in the Journal: Micromachines 2022, 13, x FOR PEER REVIEW of /2022/
- future: A thin specimen will also help to reduce the variety of of atomic arrangements in the direction of thickness and reduce the difficulty of analysis of atomic arrangements in the direction of thickness and reduce the difficulty of analysis of grain-boundary evolution. grain-boundary evolution . . .
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