HIGHLIGHTS
- who: Daniel Schiwietz from the (UNIVERSITY) have published the paper: Thermoelastic damping in MEMS gyroscopes at high frequencies, in the Journal: (JOURNAL)
- what: The authors investigate the influence of thermoelastic damping on several highfrequency modes by comparing finite element simulations with measurements of the quality factor in an applicationrelevant temperature range. The authors compare measured and simulated quality factors of industrial MEMS gyroscopes over a wide range of eigenfrequencies. The aim of this work is to illuminate the significance of the thermoelastic damping contributions for high-frequency modes. The authors will investigate the influence of . . .
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