Surface smoothing by atomic layer deposition and etching for the fabrication of nanodevices

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• who: Sven H. Gerritsen et al. from the Sven HGerritsen, Department of Applied Physics, Eindhoven University of Technology, MB Eindhoven, The Netherlands Vincent Vandalon, Department of Applied Physics, Eindhoven University of Technology, MB Eindhoven, The Netherlands Marcel A. Verheijen, Department of Applied Physics, Eindhoven University of Technology, MB Eindhoven, The Netherlands have published the research: Surface Smoothing by Atomic Layer Deposition and Etching for the Fabrication of Nanodevices, in the Journal: (JOURNAL) of November/28,/2022
• what: In practice, the deposition/etching of sub-monolayers adds up to a uniform layer, and therefore, by executing . . .
  

   

  

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