Single-shot femtosecond bulk micromachining of silicon with mid-ir tightly focused beams

HIGHLIGHTS

  • who: Evgenii Mareev from the FacultyState University, Leninskie Gory bld1/2, Moscow, Russia. have published the paper: Single-shot femtosecond bulk micromachining of silicon with mid-IR tightly focused beams, in the Journal: Scientific Reports Scientific Reports of 19/01/2022
  • what: Si has absorbance of ~ 100 u00adcm-1 at this wavelength, and to obtain this signal the authors focused laser pulse near the sample`s surface. Thereby in the experiments , the threshold of micromodification formation was determined online from third-harmonic measurement. Retrieving the laser fluences achieved in the experiment, the authors show experimental . . .

     

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