HIGHLIGHTS
- who: Yuchao Zhang and colleagues from the Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, China School of Electrical and Mechanical Engineering, Changchun University of Science and Technology have published the research: ScAlN Film-Based Piezoelectric Micromechanical Ultrasonic Transducers with Dual-Ring Structure for Distance Sensing, in the Journal: Micromachines 2023, x of /2023/
- what: In this work a pMUT with a special dual-ring structure on scandium-doped aluminum nitride (ScAlN) is proposed.
- how: The pMUT used in the experiments is shown in the inset in Figure . . .
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