Piezoelectric-aln resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids

HIGHLIGHTS

  • who: Linya Huang from the (UNIVERSITY) have published the paper: Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids, in the Journal: (JOURNAL)
  • what: This study determines that the analytical predictions for resonant frequency in liquid media exhibit good agreement with the experimental results. The performance comparison of this work and other reported resonator-based density and viscosity sensors38,39 is shown in Table 1S of Supplementary Information.
  • how: This paper presents a piezoelectric micromachined cantilever with a stepped shape for liquid monitoring purposes. The . . .

     

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