Three-dimensional metal-insulator-metal decoupling capacitors with optimized zro2 ald properties for improved electrical and reliability parameters

HIGHLIGHTS

• who: Konstantinos Efstathios Falidas and colleagues from the Fraunhofer Institute for Photonic Microsystems (IPMS), Center Nanoelectronic Technologies (CNT), An der Bartlake, Dresden, Germany have published the research work: Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO2 ALD Properties for Improved Electrical and Reliability Parameters, in the Journal: Materials 2022, 15, x FOR PEER REVIEW of /2022/
• what: From the measured tBD data the breakdown time at 63.2% failure of the devices (t63.2 ) is extracted, which for the purpose of this paper will be called characteristic lifetime.
• how: This paper . . .
  

   

  

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