Development of an optoelectronic integrated sensor for a mems mirror-based active structured light system

HIGHLIGHTS

• who: Xiang Cheng et al. from the School of Aerospace Engineering, Xiamen University, Xiamen, China have published the article: Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System, in the Journal: Micromachines 2023, x of /2023/
• what: In this work, an optoelectronic integrated circuit (OEIC) chip based on a 180 nm CMOS process is developed and applied to detect a scanning MEMS micromirror`s phase. In this paper, a thin glass is placed on the top of the micromirror to reflect the light beam back to an optoelectronic sensor . . .
  

   

  

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