Dispersion engineering of waveguide microresonators by the design of atomic layer deposition

HIGHLIGHTS

• who: Pei-Hsun Wang and colleagues from the Department of Optics and Photonics, National Central University, Taoyuan City, Taiwan have published the research work: Dispersion Engineering of Waveguide Microresonators by the Design of Atomic Layer Deposition, in the Journal: Photonics 2023, 10, x FOR PEER REVIEW of /2023/
• what: The authors demonstrate dispersion engineering of silicon nitride waveguide resonators with atomic layer deposition (ALD). This approach determines the waveguide dispersion at a very early stage, and limits the flexibility to adjust dispersion for dividual devices. The authors explore the waveguide dispersion by depositing ALD layers . . .
  

   

  

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