Process design for the manufacturing of soft x-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation

HIGHLIGHTS

• who: G. Garcu00eda from the Centro de Microanu00e1lisis de Materiales (CMAM), Universidad Autu00f3noma de Madrid (UAM), Cantoblanco, Madrid, Spain have published the paper: Process design for the manufacturing of soft X-ray gratings in single-crystal diamond by high-energy heavy-ion irradiation, in the Journal: Eur. Phys. J. Plus
• what: This model has been presented and validated experimentally in previous works ([4-8, 19]) Material parameters are: diamond density u03c1 d 3515 kg/m3, amorphous (implanted) carbon density u03c1 aC 2060 kg/m3, diamond Young`s modulus E d 1220 GPa, and amorphous carbon . . .
  

   

  

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