Large dense periodic arrays of vertically aligned sharp silicon nanocones

HIGHLIGHTS

• who: Dirk Jonker from the (UNIVERSITY) have published the paper: Large Dense Periodic Arrays of Vertically Aligned Sharp Silicon Nanocones, in the Journal: (JOURNAL)
• what: Considering the work cited in this article, no thorough investigation of the wafer-scale homogeneity was reported like done in this work. The second set of experiments focused on the structural appearance of the SiNWs after applying the IBE step for 10:00 (mm:ss) at different incident angles, u03b8. In the work , the retardation effect on the convex corner is even more pronounced. This analysis shows a gradient oxide . . .
  

   

  

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