HIGHLIGHTS
- who: Tom Hovell and colleagues from the Wolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University, Loughborough , TU, UK have published the research: Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Featuresu2014A Review, in the Journal: Metrology 2023, 3, 139-168. of /2023/
- what: The first sensor measures stylus motion in the Z-axis using the mentioned focus error method, and the second measures rotations about the XY axes using the approach shown in Figure 3c. The studies focus on simple geometries, such as straight holes without expansion to the more . . .
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