Thin and scalable hybrid emission filter via plasma etching for low-invasive fluorescence detection

HIGHLIGHTS

• who: Erus Rustami et al. from the Division of Materials Science, Graduate School of Science and Technology, Nara Institute of Science and Technology, Takayama, Ikoma, Japan Department of Physics, Faculty of Mathematics and Natural Sciences, IPB University (Bogor), Kampus IPB have published the research work: Thin and Scalable Hybrid Emission Filter via Plasma Etching for Low-Invasive Fluorescence Detection, in the Journal: Sensors 2023, 23, 3695. of /2023/
• what: The authors propose and demonstrate a method for transferring a Si substrate on which the is deposited onto an image sensor by attaching it to the . . .
  

   

  

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