Research on a method to improve the temperature performance of an all-silicon accelerometer

HIGHLIGHTS

• who: Guowen Liu et al. from the School of Aeronautics and Astronautics, Zhejiang University, Hangzhou, China have published the paper: Research on a Method to Improve the Temperature Performance of an All-Silicon Accelerometer, in the Journal: Micromachines 2023, 14, x FOR PEER Figure REVIEW15. The average bias stability of the four accelerometers with an anchor-zone ratio of 11 13 0.8of was 15. The average bias stability of the four accelerometers with an anchor-zone ratio of 0.8 was Micromachines 2023, 14, x FOR PEER Figure REVIEW 11 of 13 of /2023/
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