HIGHLIGHTS
- who: Zachary H. Levine from the (UNIVERSITY) have published the paper: A tabletop X-ray tomography instrument for nanometer-scale imaging: reconstructions, in the Journal: (JOURNAL)
- what: The authors show three-dimensional reconstructions of a region of an integrated circuit from a 130 nm copper process. This work demonstrated use of an electron beam onto an integrated platinum target adhered to the IC wafer. ( the authors compare to medical tomography since it is the original and still most common application of tomography.)
- future: More conventional photon-counting detectors with a resolution of 100 . . .
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