Numerical study of the thermal performance of a mems pressure sensor with self-calibration capabilities

HIGHLIGHTS

• who: Albrey de Clerck and colleagues from the Department of Mechanical Engineering, Virginia Polytechnic Institute and State University have published the Article: Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities, in the Journal: Sensors 2022, 22, 3828. of 18/05/2022
• what: This work is focused on furthering understanding and improving the thermal performance of a thermopneumatic actuated self-calibrating pressure sensor. For the present work, this is true as the heater is located at the bottom of the cavity, resulting in higher temperatures at the bottom as . . .
  

   

  

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