Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators

HIGHLIGHTS

  • who: Nian Li and colleagues from the College Nanjing University China have published the article: Effects of aspect ratio on the mode couplings of thin-film bulk acoustic wave resonators, in the Journal: AIP Conference Proceedings 2045, 020088 (2018) of 18/05/2017
  • what: In FBARs, the operating thickness-extensional mode is coupled to the in-plane extension, flexure, fundamental and second-order thickness-shear modes.

SUMMARY

    The authors study the most common FBARs in which the c-axis of the piezoelectric films are in the plate thickness direction and the . . .

     

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