Influence of substrate bias voltage on the properties of sputtered aluminum-scandium thin sheets

HIGHLIGHTS

  • who: Julien Kovac et al. from the Institut für Werkstofftechnik (IWT), Bremen, Germany have published the Article: Influence of Substrate Bias Voltage on the Properties of Sputtered Aluminum-Scandium Thin Sheets, in the Journal: (JOURNAL)

SUMMARY

    In the recent years, the trend of miniaturization of mechanical or electrical systems has increased the demand on micro components. Micro forming processes are a suitable technology for the mass productions of these parts but often require sheets of high strength materials with a thickness below 30 µm. A common way to produce sheets of this . . .

     

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