A complementary topographic feature detection algorithm based on surface curvature for three-dimensional level-set functions

HIGHLIGHTS

  • who: Christoph Lenz from the Christian Doppler Laboratory for High Performance TCAD, Institute for Microelectronics, TU Wien, Guu00dfhausstrau00dfe, Vienna, Austria have published the article: A Complementary Topographic Feature Detection Algorithm Based on Surface Curvature for Three-Dimensional Level-Set Functions, in the Journal: (JOURNAL)
  • what: The authors show however that the latter is still a viable option and that the algorithm is able to reliably detect features on geometries stemming from complicated practically relevant geometries. The authors focus in particular on topography simulations for modeling semiconductor device fabrication processes, since the merging of fronts often . . .

     

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