A high-linearity closed-loop capacitive micro-accelerometer based on ring-diode capacitance detection

HIGHLIGHTS

  • who: Qi Tao and Bin Tang from the China Academy of Engineering Physics, Institute of Electronic Engineering, Mianyang, China have published the paper: A High-Linearity Closed-Loop Capacitive Micro-Accelerometer Based on Ring-Diode Capacitance Detection, in the Journal: Sensors 2023, 1568 of /2023/
  • what: This paper presents an implementation scheme and experimental evaluation of a highlinearity closed-loop capacitive accelerometer By deducing the model of the considering the influence of the the existing theoretical model error of the is corrected and a closed-loop scheme of reusing the electrode and the control electrode . . .

     

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