A magnetically controlled chemical–mechanical polishing (mc-cmp) approach for fabricating channel-cut silicon crystal optics for the high energy photon source

HIGHLIGHTS

• who: Energy Photon Source et al. from the Beijing, Peopleu2019s Republic of China, bUniversity of Chinese Academy of Sciences, Chinese Academy have published the research work: A magnetically controlled chemicalu2013mechanical polishing (MC-CMP) approach for fabricating channel-cut silicon crystal optics for the High Energy Photon Source, in the Journal: (JOURNAL)
• what: The authors report a novel and economically affordable approach for fabricating silicon-based channel-cut crystal optics. The following references, not cited in the main body of the paper, have been cited in the supporting information: Akoun and amp; Yonnet ; Buschow and amp . . .
  

   

  

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