A review of symmetric silicon mems gyroscope mode-matching technologies

HIGHLIGHTS

  • who: Han Zhang et al. from the Institute of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology Zijin College, Nanjing, China have published the article: A Review of Symmetric Silicon MEMS Gyroscope Mode-Matching Technologies, in the Journal: Micromachines 2022, 1255 of 21/06/2022
  • what: Based on the listed results the paper compares the two tuning modes and analyzes their advantages and disadvantages. The main advantage of the controller design was that it was highly croelectronics and the experiments showed that the modal frequency difference could be operable and could be . . .

     

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