A self-consistent hybrid model connects empirical and optical models for fast, non-destructive inline characterization of thin, porous silicon layers

HIGHLIGHTS

• who: Wu00f6rnhu00f6r Alexandra and colleagues from the Fraunhofer-Institut fu00fcr Solare Energiesysteme ISE, Freiburg im Breisgau, Germany have published the research work: A self-consistent hybrid model connects empirical and optical models for fast, non-destructive inline characterization of thin, porous silicon layers, in the Journal: (JOURNAL)
• what: The approach provides a fast and non-destructive investigation method, that can be used for full scale inline investigation for a two-layer stack. The authors speed up the prediction process by using a CNN and provide an algorithm to evaluate even thousands of spectra in parallel . . .
  

   

  

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