HIGHLIGHTS
- who: Andreja Erbes from the Department of Engineering, University of Cambridge, Cambridge, UK have published the research work: Acoustic mode confinement using coupled cavity structures in UHF unreleased MEMS resonators, in the Journal: (JOURNAL)
- what: This mechanism of modal coupling to higher order longitudinal/ shear modes is one of the main reasons why such unreleased resonators have finite Qs. To improve the Q and Rx of unreleased resonators without the requirement for an excessively large number of ABRs, the authors propose an architecture comprising of acoustically coupled unreleased multi-cavity resonators. The aim is to . . .
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