Adhesion strength of amorphous carbon films deposited on a trench sidewall

HIGHLIGHTS

• who: Kyohei Toyoshima and colleagues from the Department of Mechanical Engineering, The University of Tokyo, Hongo, Bunkyo-ku, Tokyo, Japan have published the research work: Adhesion Strength of Amorphous Carbon Films Deposited on a Trench Sidewall, in the Journal: Coatings 2022, 12, x FOR PEER REVIEW of /2022/
• what: In this study, a-C:H films were deposited on the Si and stainless steel substrates placed on the trench sidewall with a width of 3 mm, and the effects of two pretreatments before the a-C:H film deposition, i.e., the carbon ion implantation . . .
  

   

  

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