An investigation of the effect of the work-function variation of a monolithic 3d inverter stacked with mosfets

HIGHLIGHTS

• who: Geun Jae Lee and Yun Seop Yu from the Hankyong National University, Jungang-ro, Anseong-si, Gyeonggi-do, Korea have published the article: An Investigation of the Effect of the Work-Function Variation of a Monolithic 3D Inverter Stacked with MOSFETs, in the Journal: Micromachines 2022, 1524 of /2022/
• what: In this paper, when the gate voltage of the bottom-tier MOSFET is changed from 0 to 1 V in an M3D inverter (M3DINV) in which an N-MOSFET (NMOS) and a P-MOSFET (PMOS) are stacked, the electrical coupling and electrical parameters of . . .
  

   

  

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