HIGHLIGHTS
- who: Zebin Xu et al. from the School of Microelectronics, Shanghai University, Shanghai, China have published the research work: An SOI-Structured Piezoresistive Differential Pressure Sensor with High Performance, in the Journal: Micromachines 2022, 2250 of /2022/
- what: In this work, an SOI-based piezoresistive differential pressure sensor with high performance was designed for air pressure monitoring from 0 to 30 kPa.
- how: This paper presents a piezoresistive differential pressure sensor based on a silicon-oninsulator (SOI) structure for low pressure detection from 0 to 30 kPa. The characterization results showed that the . . .
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