Beyond 5 ghz excitation of a zno-based high-overtone bulk acoustic resonator on sic substrate

HIGHLIGHTS

• who: Padmalochan Panda from the Indian Institute have published the paper: Beyond 5 GHz excitation of a ZnO-based high-overtone bulk acoustic resonator on SiC substrate, in the Journal: Scientific Reports Scientific Reports

SUMMARY

A 650 ± 20 nm thick ZnO piezoelectric film was grown on the Pt/Ti-coated Si and SiC substrate using the RF sputtering method. The structural properties of the synthesized ZnO film on the Pt/Ti coated oxidized Si and SiC substrates were investigated using high-resolution X-ray diffraction (HRXRD, M/s. ZnO layers deposited on Pt . . .

 



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