Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: theoretical study

HIGHLIGHTS

• who: Zhikang Li and collaborators from the State Key LaboratoryJiaotong University Xi'an, China have published the research work: Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study, in the Journal: AIP Conference Proceedings 1709, 020010 (2016) of 24/Dec/2015
• what: The authors proposed a CMUT-based resonant pressure sensor for ultra-low pressure measurement.
• how: This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The resonant frequency difference between two adjacent meshing is less than . . .
  

   

  

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