HIGHLIGHTS
- who: Evgeniya Ermakova and collaborators from the Laboratory of Functional Films and Coatings, Nikolaev Institute of Inorganic Chemistry, SB RAS, Rzhanov Institute of Semiconductor Physics, SB RAS, Novosibirsk, Russia have published the research work: Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor, in the Journal: Coatings 2022, 1767 of /2022/
- what: The authors first examined it as a precursor in the CVD process. The aim of this work was to investigate the structural features, optical (refractive index, transmittance, optical bandgap) and dielectric properties of the films produced using BTMSPA . . .
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