HIGHLIGHTS
- who: Heng Liu et al. from the School of Electronic and Information Engineering, Nanjing University of Information Science and Technology, Nanjing, China have published the research: Closed-Loop Control and Output Stability Analysis of a Micromechanical Resonant Accelerometer, in the Journal: Micromachines 2022, 1281 of /2022/
- what: In this study a dynamic equation for a based on electrostatic stiffness is analyzed and the parameters influencing sensitivity are obtained. This designed an in-plane vibration-type resonant micromechanical acceleromeThispaper paper designed an in-plane in-plane vibration-type resonant micromechanical accelThis paper designed an vibration-type . . .
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