HIGHLIGHTS
- who: D. Ingerle and colleagues from the Vienna University of Technology, Stadionallee, Vienna, Austria have published the research work: Combination of grazing incidence x-ray fluorescence with x-ray reflectivity in one table-top spectrometer for improved characterization of thin layer and implants on/in silicon wafers, in the Journal: (JOURNAL) of 20/08/2014
- how: To overcome this problem the intensity of the specular reflected beam was measured simultaneously with the fluorescence radiation and the data were evaluated with the JGIXA software package from Ingerle et_al11 using the combined fitting of both measurement results . . .
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