HIGHLIGHTS
- who: Nikolay Samotaev et al. from the Micro- and Nanoelectronics Department, National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Kashirskoe Highway, Moscow, Russia have published the article: Combination of Material Processing and Characterization Methods for Miniaturization of Field-Effect Gas Sensor, in the Journal: Sensors 2023, 514 of /2023/
- what: For the models , shown in Figure 1c, there was a pyramid with a 200 u00d7 200 u00b5m square apex (where it attached to the chip).
- how: In this work in addition to the mechanical protection of a gas-sensitive structure an emphasis . . .
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