Combination of micro-corrugation process and pre-stretched method for highly stretchable vertical wavy structured metal interconnects

HIGHLIGHTS

  • who: Michitaka Yamamoto and colleagues from the Department of Precision Engineering, Graduate School of Engineering, The University of Tokyo, Hongo have published the research: Combination of Micro-Corrugation Process and Pre-Stretched Method for Highly Stretchable Vertical Wavy Structured Metal Interconnects, in the Journal: Micromachines 2022, 13, 1210. of /2022/
  • what: With a vertical wavy structure have been studied to realize highdensity and low-electric-resistance stretchable This study proposed a new method for fabricating vertical wavy structured that comprises the pre-stretch method and the micro-corrugation process.
  • how: This paper proposes . . .

     

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