Computational model for the nonlinear dynamic response of mems-based micromirror

HIGHLIGHTS

  • who: Ishak Ertugrul and collaborators from the of Mathematical Modelling, Kaunas University of Technology, Kaunas, Lithuania Research in Mechatronics and Artificial Intelligence Marmara University, Istanbul, Turkey have published the paper: Computational model for the nonlinear dynamic response of MEMS-based micromirror, in the Journal: (JOURNAL)
  • what: In this work dynamic and nonlinear responses of micromirror with 4 symmetric arms and one reflective surface were investigated. In this study, the nonlinear dynamic response of the system was obtained by designing and analyzing the MEMS-based micromirror structure, which is widely used in optical systems.
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