HIGHLIGHTS
- who: Tianchen Zhao and collaborators from the College of Mechanical Engineering, Quzhou University, Quzhou, China have published the article: Contrast Experiments in Dielectrophoresis Polishing (DEPP)/Chemical Mechanical Polishing (CMP) of Sapphire Substrate, in the Journal: (JOURNAL)
- what: __SECTION__ 6. Conclusions.
- how: The experiments were carried out on a Nanopoli-100 precision polishing machine and Figure 11 the actual machine.
- future: Figure 55 shows showsthe themagnitude magnitude and direction of DEP force on abrasive the abrasive between the upper and and direction of DEP force on the between the upper and lower . . .
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