Cronfa – swansea university open access repository _____________________________________________________________

HIGHLIGHTS

• who: Cronfa, - and Cronfa -, Swansea University from the Swansea University, Liverpool, United Kingdom have published the research work: Cronfa - Swansea University Open Access Repository _____________________________________________________________, in the Journal: (JOURNAL) of August/14,/2017
• what: The authors show that source/drain RC can be considerably lowered by_(i) optimally etching into the barrier layer using Ar+ ion beam and by_(ii) forming recessed contact metallization using an optimized Ti/Al/Ni/Au (12 nm/200 nm/40 nm/100 nm) multilayers. The authors propose a fabrication process of ohmic contacts to reduce RC of AlGaN/GaN . . .
  

   

  

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