Demonstration of heterogeneous structure for fabricating a comb-drive actuator for cryogenic applications

HIGHLIGHTS

• who: Gaopeng Xue and collaborators from the School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen, China Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen, China have published the article: Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications, in the Journal: Micromachines 2022, 1287 of /2022/
• what: The authors experimentally demonstrated the feasibility of using a heterogeneous structure for fabricating a comb-drive actuator for cryogenic applications.
• future: In future study the SOI wafer could be the replaceable material due to its homogeneous structure in which . . .
  

   

  

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